Abstract
We performed dielectrophoresis (DEP) of Au colloidal particles using PMMA pit arrays fabricated by proton beam writing. Frequency dependence of DEP shows the collection of nanoparticles at pit arrays is most efficient at the AC voltage frequency of 1 kHz. The application of DC voltage during DEP also helps transport and supply of nanoparticles to the pit arrays. Gradual increase of the AC voltage amplitude should be taken into consideration to avoid damage effects on indium tin oxide electrode by joule heating.
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