Abstract
In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm.
Highlights
With the rapid development of the semiconductor industry, precision engineering industry, micro-system technology, and materials science, many microstructures must be measured with higher precision
The main challenge in microstructure measurement is the development of micro-coordinate measurement machine (CMM) probes with nanoscale measurement resolution and three-dimensional (3D) measurement capability
The probing sphere is located at the free end of the shaft, which can be glued to the fiber cantilever
Summary
With the rapid development of the semiconductor industry, precision engineering industry, micro-system technology, and materials science, many microstructures must be measured with higher precision. Intersection with the measurement surface produces a vibration amplitude change that can be detected by sensor PZTs. Though the performance of this probing system is satisfactory, fabricating the stylus is difficult. Some micro-CMM probes with high precision, based on reflected beam detection, have been applied to 3D measurement [17,18,19]. The detection method, based on detecting reflected light, can achieve high nanoscale measurement resolution, but manufacturing a reflected membrane on a small probe is challenging. To achieve extremely high optical path magnification in limited measurement space, a fiber probe based on micro focal-length collimation, in which an optical fiber stylus acts as a micro focal-length cylindrical lens, was proposed in 2010 [27]. ACF probe has high detection performance and is compact, inexpensive, easy to fabricate, complicated structures or detection systems. Has a high signal to noise ratio (SNR) compared to the other probes
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