Abstract
Superconducting (SC) MgB2 thin films were prepared in situ in one step by vacuum co-deposition at extremely low growth temperature(Ts ∼ 110–150 °C) and at very low Mg deposition rate, far off from theMgB2 stability regime of the thermodynamic phase diagram. As-grown films are nanocrystallineand exhibit (002) texture, moderate surface roughness and SC onset up toTcon = 18 K. This is the highest critical temperature ever observed inlow-Ts as-grownMgB2 films. Our preparationmethod at very low Ts is favorable for the fabrication of layered SC hybrid electronic devices, wheredeposition and post-annealing at high temperature are detrimental to devicefunctioning. Simple post-annealing of our films in ultrahigh vacuum enhancesTcon up to 22 K due to the improvement in structural properties.
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