Abstract
As-grown Bi(Pb)SrCaCuO thin films have been formed on MgO(100) substrates at various temperatures by RF magnetron sputtering from three targets in atmospheres of O 2 and N 2 O/O 2 mixtures. The compositions of three targets were Bi 3 Pb 3 Sr 2 Ca 2 Cu 3 O x , Bi 2 Pb 2 Sr 3 Ca 3 Cu 3 O x and Bi 2 Pb 2 Sr 2 Ca 2 Cu 4.5 O x . Both films formed at 660°C in O 2 and N 2 O/O 2 mixtures showed zero resistivity at 77-78K. A film obtained at 540°C in N 2 O/O 2 mixtures showed superconductivity, while a film obtained at the same substrate temperature in neat O 2 did not. Gas mixtures of N 2 O and O 2 used instead of neat O 2 as a sputtering gas were effective in lowering the growth temperature for superconductivity by 20-40 degrees.
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