Arylazophosphonate containing polymers designed for XeCl excimer laser ablation

Abstract

Applying the N-P coupling technique, fifteen new poly(arylazophosphonate)s were synthesized by interfacial polycondensation from bifunctional diazonium salts and bifunctional phosphoric diesters. Because of their excellent film forming properties and absorption behaviour poly(arylazophosphonate)s are suitable materials for laser ablation experiments with XeCl excimer lasers (308 nm). A variety of ablated structures have been generated by irradiation of the polymer films with a commercially available pulsed XeCl excimer laser. Macro experiments indicate remarkable structures with sharp edges, clear contours, and flat bottoms. Moreover, various patterns with μm dimensions were generated by micro experiments and were characterized by means of scanning electron microscopy (SEM). The resolution of theses structures indicate that poly(arylazophosphonate)s are suitable materials for applications in microtechnology.