Abstract

The results of the investigation on artificial epitaxy (graphoepitaxy) of various semiconductors (silicon, cadmium sulphide) are presented. Single-crystal or generally oriented layers of the materials were grown on amorphous substrates (oxidized silicon or glass) having crystallographically-symmetric microrelief. In experiments with zone-melting-recrystallization of silicon, the orienting action of the microrelief is confirmed by comparison of the structure of the layers on areas with and without the microrelief. In experiments with cadmium sulphide, artificial epitaxy as a result of solid-state recrystallization was demonstrated.

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