Abstract
Measurement of secondary electron yields and electron energy distributions appears straightforward--simple equipment, simple electronics, easy-to-acquire data, at least in a laboratory setting. Unfortunately, the low secondary electron energy (2-5 eV) and the extreme sensitivity of the yield to surface condition and surrounding environment make the measurement details anything but simple. These problems affect the accuracy and interpretation of the experimental results, often in a subtle way. Most troublesome is the production of unwanted (and unexpected) secondary electrons from within the electron sources and detectors, and tertiary electrons from the surrounding vacuum chamber environment. In addition, the sample surface condition can change during measurement, for example, through electron damage or enhanced oxidation/carburization. Electron source, analyzer, and sample effects will be discussed with examples for oxidized Al, niobium, graphite, gold and, also, TiN coatings.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
