Abstract
Energy dispersive x-ray spectrometry is subject to artifacts of the measurement process that distort the recorded spectrum from the true x-ray spectrum that is generated in the specimen. Artifacts can be classified as physically inevitable or experimentally reducible or avoidable. Physically inevitable artifacts include absorption in window and detector materials, peak broadening, incomplete charge collection, distortion on the low energy side of a peak, and silicon escape peaks. Artifacts that are reducible/avoidable include stray radiation, direct entry of electrons into the detector, dead time, pulse pileup, microphony/electromagnetic interference, and ground loops. First-principles spectrum generation provides a powerful tool to assess the presence of artifacts and their impact on qualitative and quantitative applications of EDS.
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