Abstract
We report the fabrication and testing of arrays of nanoscale superconducting quantum interference devices (SQUIDs) directly written into a thin film of the high-transition temperature superconductor YBa2Cu-3O7−δ with a focused helium ion beam. We compare three array configurations with 400 nm by 400 nm nanoSQUIDs connected in series and parallel and a two-dimensional (2D) combination of both. Our electrical transport measurements show that series arrays of three nanoSQUIDs exhibit modulation voltages greater than 1 mV and that combining the devices in parallel greatly enhances the slope of the voltage–magnetic field characteristic. A 2D array with 3 SQUIDS in series and 7 in parallel exhibited a transfer function of 5.51 mV/mT.
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