Arrays of Ferromagnetic Nanorings with Variable Thickness Fabricated by Capillary Force Lithography

Abstract

A new promising strategy is reported for the fabrication of ferromagnetic nanoring arrays with novel geometrical features through the use of capillary force lithography and subsequent reactive ion etching. In particular, we fabricated two different types of elliptic rings with variable width and height: one with pinching zones near the major axes and the other with pinching zones near the minor axes. We used PDMS stamps with either elliptic hole or antihole arrays for creating these elliptic rings with variable thickness by virtue of the uneven capillary rise, which was induced by the distributed Laplace pressure around the walls of elliptic holes or antiholes with nonuniform local curvatures. We transferred the polymer ring patterns to array of elliptical NiFe rings by Ar ion milling and characterized magnetic properties in terms of nonuniform ring width using magnetic force microscopy measurements. Our results demonstrated that the magnetic domain wall can be positioned in a controlled manner by using these novel elliptical ferromagnetic rings with local pinching zones and that the proposed CFL method can be utilized as a simple and effective fabrication tool.