Arrays of addressable high-speed optical microshutters

Abstract

This paper describes an optical MEMS based on an array of electrostatically actuated polysilicon microshutters. Developed in the framework of an industrial project, they are integrated in a matrix of 602 elements that can be individually addressed and that constitute the core of an assembly for light switching. Despite severe specifications on the long-term functionality of this system, samples devices with several tens of millions of cycles have been demonstrated. The paper will focus on the technology, the design and the characteristics of these arrays. A large experimental work has allowed us to identify the main failure modes and the long-term behavior such as out of plane movement or in-use stiction. These phenomena will be discussed hereafter. We also report on possible improvements of the design that should solve the remaining limitations of the system.