Array of piezoelectric lateral electric field excited resonators

Abstract

An array containing two resonators placed on X-cut lithium niobate plate has been experimentally investigated. The resonator’s lateral electric field was directed along the Y-crystallographic axis. It has been shown that stable resonance exists for a longitudinal acoustic wave propagating along the X-axis in the area between the electrodes. A layer of special damping coating was deposited around the resonators and on the part of electrodes to suppress parasitic oscillations induced mainly by Lamb waves. Frequency dependences of the real and imaginary parts of electric impedance/admittance were measured for every resonator to find resonant frequency and Q-factor with series and parallel resonances. The optimal values of width of electrode coating for every resonator were revealed which provide good resonance quality. The measurements of parameter S12, which characterizes a degree of acoustical coupling between the resonators, have shown its value to be higher than 50dB in the absolute value in all the cases considered. This means that the resonators under study are entirely acoustically decoupled. Thus it has been demonstrated that the damping layer not only provides a sufficiently good quality of every resonator’s resonance, but it also assures their entire acoustical decoupling.