Abstract
We have examined the growth of gold nanoparticles on roughened Si surfaces prepared by high-energy electron irradiation with high flux of 9.9 × 10 20 e / cm 2 s . Observing size and areal distribution of particles on an electron entrance surface by transmission electron microscopy, we have found peculiar growth and array of gold nanoparticles depending on temperature and surface roughness, which is suggested to be introduced on an electron entrance surface similarly to an electron exit surface. We proposed that the electron irradiation with high flux is useful to control the various arrays of gold nanoparticles in the roughened area.
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