Aromatic polyethers with 2,6-bis(4-azidotetrafluorobenzylidene)cyclohexanone side fragments and styryl groups in the backbone

Abstract

140 Aromatic polyethers (APEs) with perfluorophe nylene fragments in the backbone have a number of valuable properties such as high thermal and chemical stabilities, good mechanical and insulating properties, and low water absorption. Therefore, these polymers are promising for aerospace industry and microelec tronics [1–3]. We suggested that APEs of this type containing additionally 2,6 bis(4 azidotetrafluorobenzylide ne)cyclohexanone fragments and styryl groups in the backbones of the macromolecules may present practi cal interest as binders of thermally stable negative pho toresists. Note that new styryl containing bisphenols that have been recently synthesized [4] are suitable as building blocks in the design and synthesis of APE, which are promising, in our opinion, for the produc tion of such photoresists. However, such APEs have not yet been reported. In this work, we propose for the first time a strategy for the synthesis of azide containing APEs with styryl groups in the macromolecule backbones. We per formed a facile and convenient synthesis of such unsaturated polymers by exhaustive esterification of APEs containing carboxyl side groups by 2,6 bis(4 azidotetrafluorobenzylidene) 4 (2 hydroxyethyl)cyc lohexanone (bisazide OH). In addition, thermal transformations of the synthesized polymers and their photochemical curing induced by the products of photolysis of azide containing fragments were stud ied, and the systems were evaluated as negative photo resists.