Argon metastable density and temperature of a 94 GHz microplasma

Abstract

Laser diode absorption spectroscopy is used to experimentally measure Ar(1s5) metastable density and translational gas temperature within a 94 GHz microplasma. A square two-dimensional photonic crystal (PhC) at this resonance frequency serves to ignite and sustain the plasma from 20 to 200 Torr (2.7 × 103–2.7 × 104 Pa) by using millimeter wave power from 300 to 1000 mW. Metastable density within the plasma is estimated from the absorption line shape of the laser traversing the PhC. The metastable density reaches an order of 1019 m−3 at lower pressure and decreases as pressure increases. From the Lorentzian line shape of the absorption profile at 811.53 nm, the gas temperature is extracted and found to increase from 500 K at 20 Torr to 1300 K at 200 Torr. These data are analyzed and compared with a zero-dimensional plasma model and with previous experimental plasma results at 43 GHz.