Area-selective nucleation of copper on fluorocarbon–resin surface using ArF excimer laser-induced chemical modification

Abstract

Area-selective nucleation of copper onto fluorocarbon–resin surface was demonstrated by using an ArF excimer laser and copper–sulfate (CuSO4) aqueous solution. Pyramid-typed shaped nuclei of copper were initially formed on even an inert surface of fluorocarbon–resin in the same way as semiconductor or metal surfaces. Interface of copper nuclei and fluorocarbon–resin was chemically bonded through oxygen which was photodissociated from water in copper–sulfate aqueous solution under ArF excimer laser irradiation. The modification cannot be successful without our previous defluorination efforts using ArF excimer laser-induced chemical reaction.