Arc-to-sheet printer for high-precision patterning with positional errors below 6 ppm at 3σ level: Trochoidal trajectory mechanism for rotary motion of arc

Abstract

Pattern registration accuracy is a key property in printing processes, especially for miniaturized printed electronic devices that require the overlay of multiple layers. Except for inkjet and screen printing, various printing methods such as gravure offset, flexographic, and reverse offset printing typically use a roll-to-sheet type printer; however, registration has been limited, especially in the machine direction because of the speed variation in rotary motion of a cylindrical roll. We developed an arc-to-sheet type printer in which the rotary motion of an arc was realized by a trochoidal trajectory because such a mechanism can only be constructed using the translational motions of high-precision linear actuators. A prediction model for the behavior of the contact point of the arc during printing was also developed, along with a method for compensating for mechanical and assembly errors, which was verified by laser displacement measurements and torque exerted on the linear motor of table. Cu patterns reverse offset printed by the developed arc-to-sheet printer had positional errors of less than 3σ < 6 ppm with an optimized processing condition, achieving an unprecedented level of accuracy in printed electronics.