Abstract
Abstract Vacuum cathodic arc evaporation is well established for the industrial deposition of a variety of hard and metallic coatings for different applications. The standard heating and ion-cleaning processes are easily carried out by the metal ion bombardment generated by the vacuum arc. A novel method for heating and ion cleaning based on a dense argon plasma produced by the electrons from the vacuum arc is presented, namely the arc-enhanced glow discharge (AEGD). In addition to selected plasma parameters, some characteristics features of TiN coatings deposited by AEGD surface conditioning are presented.
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