Arc discharges operation in “elion” mode

Abstract

This paper presents the results of a study of an electron-ion-plasma alitization system using two arc plasma generators: a gas plasma generator based on a non-self-sustained arc discharge with a thermionic cathode “PINK” and a gas-metal plasma generator based on an arc discharge with a cathode spot. The system for discharges supplying and biasing of the samples assumes two sub-modes of operation: the ion cleaning sub-mode (ion sub-mode) and the sub-mode of samples electron heating (electron sub-mode), thus realizing the “elion” mode of the system operation. During the experiments, both the dependences of the average values of currents and voltages of discharges burning and probe measurements of the instantaneous plasma parameters values in both system operating sub-modes were investigated. It is shown, that the electron sub-mode of system operation is characterized by an increased burning voltage, which is caused by the formation of a positive anode drop of more than 10 V in the plasmas. Such a potential distribution in the discharges ensures effective heating of the samples by the discharges plasmas electron component.