Arbitrary Curvature Radius of the Optical Parts Precision Polishing Technology

Abstract

This paper puts forward a kind of magnetorheological polishing technology of arbitrary curvature radius spherical optical parts and the mechanical structure of its supporting equipment. By changing the position of the intersection point of the spindle unit and pendulum shaft device in the space, it can achieve high quality and rapid processing of an arbitrary curvature radius of the spherical optical parts. The wheel-head structure of our equipment is an endless belt structure. The magnetorheological fluids are added to the endless belt, and the wheel-head structure 15 is powered. Then, it will form a Bingham on the endless belt with which the surface of the processed optical parts contact. At last, it will achieve precision flexible polishing process ultimately. A simple mechanical structure design and breakthrough processing method are used in the equipment and the complete processing technology, which can achieve flexible polishing of large-diameter spherical (or plane) optical components with any radius. The machining accuracy is less than 1nm, achieving the requirements of the ultra-smooth surface.