Abstract
Ar ion induced X-ray emission is a very sensitive method for the analysis of light elements ( Z < 18). Owing to the molecular orbital ionization mechanism, the K shells of light elements are excited while for heavier elements no ionization occurs. This effect can be used for the analysis of light elements in heavy matrices especially in CdTe. In classical PIXE analysis with protons these elements cannot be analyzed because of the intense Cd- and Te L escape peaks in the region of the Al to Cl K lines. With 1 MeV Ar ions the L lines of Cd and Te are weakly excited, thus allowing the analysis of the light elements.
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