Abstract
Multilayer co-fired ceramic (MLCC) material systems and fabrication methods allow the easy fabrication of three dimensional features and integration of microfluidic channels and cavities into monolithic ceramic modules. In this work, an alumina based multilayer co-fired ceramic formulation and sintering methods suitable for producing transparent ceramic microfluidic modules is developed. Alumina slurries with high solid loading were prepared using an aqueous Duramax™ B-1000 binder systems. The rheological properties and casting behavior were studied for slurries with varying the binder additions. Sintering behavior of the green tapes were studied as well. Fundamental results indicated that the transparency of the ceramic with density over 3.98g/cm3 can be greatly improved after long time sintering at 1612°C in the H2. Finally, a microfluidic MLCC module with transparent window was demonstrated by patterning, laminating, and sintering the developed Al2O3 green tapes.
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