Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment

Abstract

An analytical solution to the problem of energy spectra of sputtered atoms under light-ion bombardment of plane-parallel layer is obtained. The proposed theory is based on the invariant embedding principle applied in combination with the discrete flow method. This approach provides absolutely precise fulfillment of the boundary conditions of the Boltzmann kinetic equation. In addition, both reverse sputtering and strike sputtering can be described. The proposed method of solving plane-parallel layer problems makes it possible to approach the study of sputtering spectra of multilayer structures. In addition, a number of features peculiar to light-ion sputtering only can be considered.