Abstract
This investigation attempts to study a possible controller in improving the dynamic stability of capacitive microstructures through mitigating the effects of disturbances and uncertainties in their resultant dynamic behavior. Consequently, a nonsingular terminal sliding mode control strategy is suggested in this regard. The main features of this particular control strategy are its high response speed and its non-reliance on powerful controller forces. The stability of the controller was investigated using Lyapunov theory. For this purpose, a suitable Lyapunov function was introduced to prove the stability of a controller, and the singularity conditions and methods to overcome these conditions are presented. The achieved results proved the high capability of the applied technique in stabilizing of the microstructure as well as mitigating the effects of disturbances and uncertainties.
Highlights
The industry of Micro Electro Mechanical System (MEMS) has been among the most significant businesses in the recent last decades, gaining the attention of numerous researchers all over the world
H-infinity method was employed to mitigate uncertainties and noises. He and Geng [74] studied the dynamics and robust control of a torsional gyroscope subjected to electrostatic force with considering structural uncertainties
Owing to the importance of controlling the responses of microstructure and the efficiency of the Nonsingular Terminal SMC (NTSMC) control strategy as well as its high response speed, this study investigates the stabilization of micro-capacitors in the presence of disturbances and uncertainties
Summary
The industry of Micro Electro Mechanical System (MEMS) has been among the most significant businesses in the recent last decades, gaining the attention of numerous researchers all over the world. One of the important concerns concerning the dynamic behavior analysis of these structures are the effects of external disturbances and uncertainties. The common studies on examining microstructure dynamical behavior do not include disturbance and uncertainty effects [42,43,44,45].
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