Abstract
In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products.
Highlights
The fourth revolution of the industry is powered by a wide range breakthrough, new technology, innovative ideas and creative activities
UV-LIGA MEMS technology combined with electroplating was developed to produce hybrid stepper micromotor based on soft magnetic composites
Soft magnetic materials obtained by developed method have the following properties: ρ = 10-3–10-4 Ohm m for the metal state, ρ = 103–104 Ohm m for the dielectric state, maximum magnetic permeability varies from μ = 2500–3000 for the metal state and μ = 300–500 for the dielectric state
Summary
The fourth revolution of the industry is powered by a wide range breakthrough, new technology, innovative ideas and creative activities. They differ in complexity, minimal dimensions of produced element, element size tolerances, materials suitable for processing, etc In this regard, it is relevant to develop manufacturing technologies for 3D MEMS elements based on polymer micromold production with subsequent deposition of functional material into the mold. Unique specific parameters of a soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 oС These allow producing electric machines with the large number of poles and high frequency of switching, improving specific mass and size parameters. UV-LIGA MEMS technology combined with electroplating was developed to produce hybrid stepper micromotor based on soft magnetic composites. It provides easy removal of rotors or stators from conductive substrate without photoresistbased micromold destruction
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
