Applications of parylene films in the manufacture of organic field-effect transistors

Abstract

Abstract Along with the technology of microscopic electromechanical systems and that of brain–machine interface, the area of organic electronics presents a major development direction of high-tech applications of parylene coatings. Within this area, a fabrication of organic field-effect transistors (OFETs), where parylene C is applied as a gate dielectric, makes the most common use of these materials. The main advantage of parylene coatings in the OFET technology is their very high purity. Depending on a transistor design, films of parylene C may play a role of the gate dielectric material, that of a protective insulator coating, and/or that of a device substrate. The work presents a number of applications of parylene C in different OFET devices, namely in organic thin film transistors (OTFTs) and organic single-crystal transistors developed by the authors. A combination of zone-cast films of active materials, both n-type and p-type, with parylene C gate dielectric makes a principal design of the OTFTs. In this group, the best performance parameters and namely μFE = 0.18 cm2/Vs, Ion/off = 104 and turn-on voltage