Abstract
Production of ion microbeams using tapered glass capillary optics was introduced more than 10 years ago. This technique has drawn attention in terms of both its peculiar transmission features and application to ion beam analysis. The transmission mechanism based on a self-organized charge-up process for keV-energy ions was observed for the first time in an experiment using a multitude of nanometer-sized capillaries in a polymer foil. The same mechanism can be seen for the transmission of keV ions through a single tapered glass capillary. The transmission experiments with keV ions showed a delayed transmission, focusing effects, guiding effects, and formation of microbeams. Experiments using MeV-energy ions always aim at applications of microbeam irradiation for material analysis, surface modification, cell surgery, and so on. In this article, the applications of MeV ion microbeams, including the fabrication method of the glass capillary, are reviewed, as well as the experimental and theoretical studies for the transmission mechanisms of keV/MeV ions.
Highlights
When an ion beam accelerated by kV in vacuum enters an inlet of a glass injection needle, a so-called a tapered glass capillary, the ion beam will appear from the outlet with a peculiar delay of tens of seconds
An Ar8+abeam extracted instead a microbeam, theresonance total transmission muchwas lower than 1.8%.by 1 kV and entered the glass from anof electron cyclotron (ECR) ionissource accelerated
The light travels depending on the of stopping power Produced of individual ions, realizing through an objective lens of the microscope used in the microbeam irradiation, and is measured by a
Summary
When an ion beam accelerated by kV in vacuum enters an inlet of a glass injection needle, a so-called a tapered glass capillary, the ion beam will appear from the outlet with a peculiar delay of tens of seconds. The phenomenon was found using an 8 keV Ar8+ beam and tapered glass capillary optics with an outlet of 24 μmφ, and reported by Ikeda et al in 2006 [1]. It was astonishing because of the delayed transmission, but the beam focusing, the beam bending by up to 5◦ , and a possibility to produce micrometer-sized beams . Owing to the short distance of a few m between the capillary outlet the cell surface, beam broadening byismultiple scattering in of the liquid almost. The history and the mechanism of the capillary transmission ions introduced briefly
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