Applications of mass spectrometer to the measurement of micro leak rates or throughputs

Abstract

The “peak method” for measurement of micro leak rates has been investigated. The results obtained by solving the appropriate differential equations show that the peak outputs signal is proportional to the accumulation time and leak rates. An experimental apparatus for studying the method is described. The use of Zr-Al getter pump, cryosorption pump and titanium sublimation pump as a selective pump in the measuring system is also discussed.