Applications of lithographic mask technology in fabrication of diamond dresser

Abstract

Microfabrication was employed in the fabrication of diamond dressers. Diamond-nickel composite was utilized for fabricating columnar cutting tips and compared with those fabricated by the brazing connective approach. In this study, microcolumns with diamond grits embedded in the nickel deposit electroplated on the substrate with guidance of the resist mold can improve the population density of working diamond grits in the diamond dresser. Moreover, the load force is dispersed on the plurality working diamond grits within one column, which in turn increasing in the durability of the dresser. This technique can produce diamond dressers with improved uniformity in both the distribution and protrusion control of microcolumn diamond cutting tips. In addition, the presently developed diamond dressers exhibit an increase in material removal rate by some 15 %, while, at the same time, maintain a relatively low worn rate as compared with the commercially available dressers. This microcolumn (e.g., diamond-nickel composite) is efficient to share the applied load and also extends tool’s life during polishing.