Abstract
Abstract Diamond-like carbon (DLC) films deposited by plasma enhanced CVD (PECVD) are characterized by nanolevel smoothness, high hardness, and extremely high resistance to wear and to chemical attack. They also have very high electrical resistivity and good optical transmittance in the visible and infrared. The properties of the DLC films make them attractive candidates for protective coatings, especially at submicron thickness, and as a dielectric material. However, DLC films are characterized by very high internal stresses, and their usefulness is thus dependent upon achieving strong adhesive bonds to the substrate on which they have to be deposited. This paper details the properties of DLC films deposited by PECVD using acetylene, ways to improve their adhesion to a variety of substrate materials, and resultant tribological behavior. Applications of DLC are presented, those being as a protective coating for magnetic recording media, electrical insulation for chip cooling, and protective coatings for photolithographic masks.
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