Abstract
Atomic layer deposition (ALD) provides a unique tool for the growth of thin films with excellent conformity and thickness control down to atomic levels. The application of ALD in energy research has received increasing attention in recent years. In this review, the versatility of ALD in solar cells will be discussed. This is specifically focused on the fabrication of nanostructured photoelectrodes, surface passivation, surface sensitization, and band-structure engineering of solar cell materials. Challenges and future directions of ALD in the applications of solar cells are also discussed.
Highlights
Atomic layer deposition (ALD) is a low-temperature, vacuum, vapor-phase thin film growth technique that allows precise control in film thickness on an atomic scale and uniformity. It distinguishes itself from chemical vapor deposition (CVD) in that the precursors in an ALD process are injected into the reaction chamber in sequenced deposition cycles [1]
This article discusses typical application of ALD in solar cells. It starts with the fabrication of nanostructured electrodes, followed by electrode surface passivation, electrode surface sensitization by quantum dots and metal nanoparticles, and band-structure engineering in dye-sensitized and CIGS solar cells
dye-sensitized solar cells (DSSCs) were fabricated by depositing an ALD layer of TiO2 onto transparent conducting indium tin oxide (ITO) [28, 29]
Summary
Atomic layer deposition (ALD) is a low-temperature, vacuum, vapor-phase thin film growth technique that allows precise control in film thickness on an atomic scale and uniformity. It distinguishes itself from chemical vapor deposition (CVD) in that the precursors in an ALD process are injected into the reaction chamber in sequenced deposition cycles [1]. This article discusses typical application of ALD in solar cells. It starts with the fabrication of nanostructured electrodes, followed by electrode surface passivation, electrode surface sensitization by quantum dots and metal nanoparticles, and band-structure engineering in dye-sensitized and CIGS solar cells
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