Abstract
Three technologies for precise microoptical elements with more than one optical function and fabricated on wafer-scale are described. The combination of reflow technology and direct laser beam writing results in hybrid microoptical elements, comprising, e.g. refractive and diffractive elements. Another method, selective uv-replication enables for hybrid integration of microoptical elements and optoelectronic wafers and is demonstrated for microlenses integrated on VCSEL and LED-chips. As the third method, double-sided uv-replicated microoptics used, e.g. for micro-telescopes, is demonstrated.
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