Abstract
A device was constructed to determine elements of low atomic number by non-destructive TXRF analysis. It consists of a Cr-X-ray tube, an optimized reflection unit, a detector with an extremely thin entrance window, a low noise amplifier, and a sample changer. To minimize the absorption losses, the main parts are placed in a vacuum chamber with a very thin Be window. Using this arrangement it is possible to measure elements down to oxygen from the pg- to the ng-range.
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