Abstract
A systematic quantitative method of analyzing vacuum processes is presented. This method is especially suited to determining the outgassing occuring within a vacuum system as a continous function of time and analyzing the resulting data to obtain information as to the source and nature of the outgassing. The technique and its application in determining the optimum combination of such parameters as temperature, time, materials, restrictions and pumps on such processes as hermetic volume exhaust and cellulose dehydration are described. Vacuum process evaluation techniques are used to study such phenomena as the outgassing characteristics of insulating materials and vacuum gauges, the flow of gases through orifices and short tubes, and the gettering action of materials. The method has been programmed for digital computer solution and is a rapid and inexpensive way to analyze some vacuum engineering problems.
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