Application of tungsten films for substrate masking in liquid phase epitaxial lateral overgrowth of GaAs

Abstract

AbstractLiquid phase epitaxial lateral overgrowth of GaAs layers on GaAs substrates masked by tungsten films was studied. We show that at our growth conditions perfect growth selectivity was obtained, so the layers started growing from the openings cut in the mask only. However, serious damage of the mask during epitaxial growth was observed. As this deteriorates crystallographic quality of the layers a procedure was elaborated to eliminate degradation of the tungsten film by the melt. In particular, reduction of growth temperature and deposition of Au/Zn wetting layers between tungsten film and the GaAs substrate were found important to avoid degradation of the mask and for successful lateral growth of the layers. Tungsten masked GaAs substrates were then used for lateral overgrowth of GaAs by liquid phase electroepitaxy. Preliminary results are presented showing that application of electrically conductive tungsten mask, which allows a direct DC current flow from the melt to the substrate, results in much wider and thinner electroepitaxial layers than those grown on the substrates coated by insulating film.