Abstract
This paper describes the outgassing properties of titanium materials, and development of vacuum chambers and components for practical UHV/XHV systems. The mechano-chemically polished and the chemically polished titanium materials have a smooth surface and a thin (≤ 10 nm) oxide surface layer, which showed extremely low outgassing rate below 10−12 Pams−1 after baking process. In order to fabricate practical vacuum systems welding, metallizing and brazing processes were optimized, and complex shaped vacuum chambers and various vacuum components such as a bellows, valve, electric feedthrough and ceramic duct with titanium sleeve were fabricated. Sufficient mechanical properties and durability were obtained for practical use.
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