Abstract
The application of thin film inductors to thin film based LC filters is discussed. The trial monolithic thin film LC filter consists of thin film inductors and thin film capacitors, fabricated by RF sputtering and ion-milling techniques. This filter is a second-order low pass filter with a cutoff frequency of 50 MHz. Two kinds of filters are fabricated, using a nonmagnetic thin film inductor on a magnetic thin film inductor. It is proved that magnetic thin film permits the reduction of the size and the insertion loss of the filter. >
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