Abstract
A new type of gas sensor with very fast response and high sensitivity, which can detect the thermal conductivity change in a known ambient gas due to mixing with a gas of different thermal conductivity at elevated temperature, has ben developed and demonstrated. Since this new type of gas sensor can be easily heated above 400 °C because of its air-bridge microheater structure, the surface of its sensing area is refreshed every time by burning out adsorbed dust, oil, etc. This gas sensor can be used as an absolute-humidity sensor and a vacuum sensor.
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