Abstract
Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film's properties. Linear dispersion curve makes it possible to calculate only one film's property. Special approach is presented to overcome this limitation. Boron carbonitride BC x N y and silicon carbonitride SiC x N y H z films are studied by SAWS. Their densities and Young's modules are determined. The results are corresponding to known data on structure and composition of the films.
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