Abstract
An ultraviolet array photodetector is developed by the application of a LiNbO3-based slanted finger interdigital transducer (SFIT) and several ZnO optically active areas. This array photodetector can obtain ultraviolet light intensities within a single measurement. In this analysis, the acoustoelectric interaction between the photogenerated carriers in several active areas and a SFIT surface acoustic wave device is simulated. In the experiment, the photodetector with one to three optically active areas are fabricated. Ultraviolet light with a wavelength of 380 nm and an intensity of 65 μW cm−2 is detectable from the photodetector developed in this study. The minimum size of the optically active areas is 0.04 mm2 that can provide good spatial resolution. The ultraviolet array photodetector is capable of measuring a distributed light field.
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