Abstract
A theoretical method based on quantum scattering theory is presented to evaluate the performances of 2-D focusing multilayer reflection circular zone plate. The numerical application results of a 2-D focusing multilayer reflection circular zone plate (Mo/Si 24 periods with a doublelayer thickness of 7 nm, zone plate structure with 417 zones, inner zone half-width of 52 μm and outer zone width of 0.9 μm) are given. The theoretical results are compared with the experimental results reported by other researchers.
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