Application of probe manipulation to the fabrication of a smart probe

Abstract

We have developed a probe manipulation technique, and fabricated apparatus that can manipulate and weld fine metal objects of 10 μm to 100 μm. They are caught with a tungsten probe by applying voltages less than 100 V to the probe. Fine metal objects are welded by contact welding and non-contact welding using the tungsten probe as an electrode after it was set in place. Contact welding corresponds to resistant welding, and non-contact welding corresponds to arc welding. Here, we introduce the application of a smart probe for probe cards. Noble metal alloy particles of 40-75 μm are welded at the top of a rhenium-tungsten alloy wire of 125 μm in diameter using the apparatus. The composite will be the smart probe by sharpening the tip. The smart probe will improve the performance of the probe cards. The tip of the noble metal alloy reduces the contact resistance and will extend the life of the probe card. A cross section of the welding interface between the wire and the particle is examined by an SEM and an EDX.