Application of piezoelectric actuator in series nano-positioning stage.

Abstract

The existing nano-positioning stages are driven by the piezoelectric ceramics, which have features of high accuracy and resolution, but the traditional positioning stage could not meet the requirement of large working space because the displacement of the piezoelectric ceramics is only tens of microns. To solve the contradiction between high accuracy and large working space, a novel non-resonant piezoelectric linear actuator, which adopted the two parallel v-shaped stators as the double driving feet, was proposed, and both its working principle and structure were discussed in detail. The actuator was used to drive the positioning stage directly to obtain the performance of nano-positioning and large working stroke. The experiment results show that the resolution of the actuator is 0.015 μm, and its stable maximum motion speed is 17.4 mm/s, while the degree-of-freedom of step resolution of teach nano-positioning stage is 0.018 μm, 0.016 μm, and 0.3 μrad, respectively. Compared with the traditional positioning stage, the nano-positioning stage driven by the actuators directly also has excellent working stroke. The key performance of both high resolution and large working stroke of the nano-positioning stage was realized based on different motion modes of only one piezoelectric actuator.