Abstract
Thermal neutron depth profiling (NDP) provides an isotope specific, nondestructive technique for the measurement of concentration versus depth distributions in the near-surface region of solids. The profiles are generated in real-time, analyzing depths of up to tens of micrometers. The method is currently applicable to the investigation of He, Li, Be, B, Na and Bi profiles. Demonstrative applications are presented for the technique, including: ion implantation-anneal sequence profiling; diffusion studies in a number of microelectronic materials; and homogeneity analysis of thin glass film overcoats. Comparisons are made for NDP and other profiling techniques such as secondary ion mass spectrometry (SIMS), Rutherford backscattering (RBS) and spreading resistance profiling (SRP).
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