Abstract
Nano-probe electron diffraction has been applied to local structure analysis of a sputter-deposited amorphous Pd75Si25 alloy thin film with the help of high-resolution electron microscopy. Corresponding to local lattice fringe images due to the atomic medium range order (MRO) extending over 1 to 3 run, nano-diffraction patterns with various zone-axes were obtained by using a field emission transmission electron microscope. It was found that the structure of MRO is hexagonal of the Pd2Si-type with lattice parameters a = 0.715 and c = 0.312 nm. Nearest neighbor atomic distances of Pd-Pd and Pd-Si obtained from the present analysis were compared with those obtained from the pair distribution function analysis made by using halo electron diffraction pattern of the same specimen. On the basis of nano-diffraction pattern calculations, a discussion was made on the limitation of structural analysis of MRO structures by nano-diffraction.
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