Abstract
Monte-Carlo simulation (MCS) using X-ray emission due to electron beam excitation is applied to determine the film thickness of a one-layer/substrate system. So far, the characteristic X-ray intensity has been used in this kind of simulation. However, it is difficult to utilize this method for a complicated system such as a multilayered structure. We succeeded in determining the layer thicknesses for a two-layered system, by a new method using characteristic Si-L2,3 soft X-ray emission band spectra. This method is shown to be promising for the quantitative analysis of multilayer and complicated systems. In this study, a quantitative analysis using both MCS and Si-L2,3 emission band spectra is demonstrated for the NiSi/NiSi2/Si system.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
