Abstract
The advantage which we can get it when we apply the micro fabrication technology to the preparation processes of small fuel cells is investigated. The deep reactive ion etching for the gas channel preparation and the formation of porous silicon layers for MEA supports by electrochemical process are the key technologies to improve the MEMS-based micro fuel cells. The MEMS technology can control the fine and precise flows of the fuel, air, and water in the electrodes, which may improve the current and power densities in a small fuel cell.
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