Abstract
The activation of an impregnated dispenser cathode was characterized by SIMS, AES, and XPS on the basis of analogous results from prepared thin film model standards of the Ba-O-W system. Proper SIMS characterization required low damage conditions (500 eV Ar +, 5 nA/cm 2) and ultrahigh vacuum (better than 2×10 -10 Torr during analysis). Individual low damage SIMS yields from different model structures varied by several orders of magnitude; and consequently, the identification of the activated cathode structure from model compound yields was straightforward. While X-ray induced AES of cathodes requires curve synthesis to identify the activation transition with temperature, the low damage SIMS yields showed obvious but continuous transitions through the activation temperatures.
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