Abstract
Analog to the approach used in linear elastic fracture mechanics, the electric discharge breakdown in interconnects is analyzed. The electric field is solved using the conformal mapping technique. The direction of electric field at the upper slit surface is opposite to that at the lower surface. Similar to the Griffith fracture criterion, we propose that the critical power release rate for crack propagation is equal to the electric breakdown power required to create a unit area of microcrack. It is found that the power release rate increases with decreasing linewidth of interconnect.
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