Abstract
A 8 MeV multicharged carbon or oxygen beam was used for Rutherford Backscattering Spectrometry (RBS) compositional analysis. Thin films of Co, Cu, Si, and NiCr of a few nm thickness were deposited on carbon substrates by vacuum evaporation or Ar sputtering. The measured results demonstrate that the mass resolution is much better for the heavy-ion RBS than for the He-RBS analysis. For the compositional analysis, a fitting function formula is proposed based on a simple model in which the thin film consists of many islands. The calculated results agree with the measured spectra, which show asymmetry of the peaks. Numerical analyses using the fitting function give reasonable agreement between the expected and measured ratios of mass elements in the films.
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